3.B Target Pusher Layer Fabrication Developments

The Target Group has recently begun to apply ion beam sputter deposition for target pusher layer fabrication. Metal deposition on both levitated and stalk-mounted fusion targets has been demonstrated. We believe this is the first application of this versatile deposition technique to IF target pusher layerfabrication. Our initial results indicate that ion beam sputtering is far more controllable than the more conventional magnetron sputtering, and its use should permit us to produce bettercoatings of a wide variety of materials than was previously possible.